ME 423 - Intro to Dynamics of Microsys

Credits: 3

The course aims to introduce the students to the principles of MEMS and Microsystem dynamics and their modeling techniques. The course is multi-disciplinary in nature and will tackle several multi-physics problems, which include vibrations, dynamics, fluid mechanics, heat, electronics and electricity, etc. It will emphasize analytical and some numerical modeling techniques. The topics will include topics such as Sensing and Actuation in MEMS (electrostatic, electrothermal, piezoelectric, electromagnetic, etc), Elements of Lumped-Parameter Modeling in MEMS (stiffness, damping, inertia), case studies of accelerometers, gyroscopes, filters, switches, mirrors, and basic principles of stability and nonlinear analysis of microsystems. Prerequisites: ME 421. Offered in the Fall.