ME 573X - Micro/Nanomaterials Processing

Credits: 3

This course will explore how micro and nano-scale materials and devices are produced. Covered topics include the 1) fundamentals of micro and nano-materials processing in material science and transport phenomena, 2) micro and nano-fabrication processes for Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS), 3) existing and emerging manufacturing processes for industrial scale production of micro- and nano-scale materials, and 4) Metrology and characterization tools for conducting research in micro and nano-materials processing. This course is cross-listed as a graduate-level course. Completion of additional assignments is required for graduate credits. Prerequisites: ME 302 or approval of instructor. Term offered varies.